摘要
依据三角测量原理,设计了一款采用位敏探测器(PSD)作为敏感元件,半导体激光器作为发光器件的位移检测传感器系统。由于PSD输出的是微弱光电流信号,电路的设计以及发光元件的选择极大地关系到该系统的性能。分析了采用不同电路元件参数的组合对该传感器系统在抗干扰能力,测量精度方面的影响,以及采用不同发光器件时传感器系统的性能差异,并由以上分析结果设计出一款位移检测传感器系统,最后通过实验测试了该传感器系统的性能。
Based on triangulation principle, a displacement detection system using PSD as the sensor and semiconductor laser as the light source is designed. Because the output photocurrent signal of PSD is weak, the circuit design and the choice of light-emitting components are greatly related to the performance of the displacement detection system. The anti-jamming performance and detection accuracy of the system were analyzed with different circuit elements and parameters, and the difference of the detection performance when using different light-emitting components was analyzed too. According to the above results, a displacement sensor system is designed, and finally the performance of the sensor is tested by the experiments.
出处
《半导体光电》
CAS
CSCD
北大核心
2010年第1期157-160,共4页
Semiconductor Optoelectronics
基金
湖南省自然科学基金资助项目(05JJ30091)
湖南省重点科技攻关项目(04GK2004)
关键词
位移检测
位敏探测器
抗干扰
测量精度
displacement detection
PSD
resisting disturbance
measuring precision