GCT/GTO阴极梳条修理的方法

Repair Approaches of Cathode Fingers for GCT/GTO

在分析GCT/GTO阴极结构的基础上,指出了阴极失效梳条的成因及其危害,就减少失效梳条带来的影响,介绍了阴极梳条修理方法和装置。实际生产的统计数据表明,修理梳条方法降低了GCT和GTO芯片废品率和生产成本。

Based on analyzing cathode structure of GCT/GTO, formations and damages of the failure cathode fingers are indicated. Furthermore, in order to minimize the influence caused by failure fingers, it introduces repair approaches and equipments of cathode fingers. The actual statistics of production data shows that the approaches can decrease reject rate and production cost of GCT and GTO.