光刻技术在金属板片刻蚀上的应用

Application of photoetching technique in metal diaphragm

介绍了应用双面自对准光刻技术刻蚀金属板片的工艺原理、方法、工艺参数的选取原则以及双面自对准光刻模具设计准则,该项技术已成功应用于液体火箭发动机层板喷注器和膜片阀的研制和生产之中。

Technology principle, method and principle of parameters determiantion of double-face self-aligning photoetching technology in metal diaphragm were introduced in this paper. The technique has been applied in platelet injector and diaphragm valve of liquid rocket engines.