微硅加速度传感器的动态特性补偿方法研究

A study on dynamic compensation method for micro - silicon accelerometer

提出了一种用以扩展加速度传感器使用频率范围的动态特性补偿方法，其基本原理是根据加速度传感器的输入输出传递函数，构造出一个基于硬件的补偿网络，这个补偿网络的传递函数的零极点分别与加速度传感器的传递函数的极零点相抵消，从而使由加速度传感器输出的信号经过补偿环节后其动态特性得到补偿，扩展了加速度传感器的使用频带，同时并不要求加速度传感器处于临界阻尼状态。

Presents a new method of compensating the dynamic error of accelerometer which could expand the frequency limitation of accelerometer, the basic theory is that according to the transient function of accelerometer, we can setup a compensating network besed on hardware , the pole and the zero points of the network's transient function, therefore the dynamic could be deleted with that ones of the accelerometer's transient function, therefore the dynamic error of the output of accelerometer is compensated by the compensating network of hardware , and the usable frequency limit of the accelerometer is expanded, meanwhile with this method the damping ratio of the accelerometer need not have to be at the ratio.