摘要
Developing surface-enhanced microcantilevers with improved sensitivities is of longstanding interest. In this paper, the design of surface-enhanced cantilever sensors using nano- （micro-） porous films as surface layers is proposed. The static deformation and resonance frequencies of these surface-enhanced sensors with the simultaneous effects of the eigenstrain, the surface stress and the adsorption mass are analyzed. It is shown that the sensitivities of these novel cantilever sensors for the static deformation and resonance frequencies can be tuned by the porosity, the size of the pores and the structure of the porous films. For the three kinds of cantilever consisting of solid films, films with aligned cylindrical micro-scale pores, and those with nano-scale pores, the nano-porous one has the highest static and dynamic sensitivities, whereas the solid one has the lowest.
Developing surface-enhanced microcantilevers with improved sensitivities is of longstanding interest. In this paper, the design of surface-enhanced cantilever sensors using nano- （micro-） porous films as surface layers is proposed. The static deformation and resonance frequencies of these surface-enhanced sensors with the simultaneous effects of the eigenstrain, the surface stress and the adsorption mass are analyzed. It is shown that the sensitivities of these novel cantilever sensors for the static deformation and resonance frequencies can be tuned by the porosity, the size of the pores and the structure of the porous films. For the three kinds of cantilever consisting of solid films, films with aligned cylindrical micro-scale pores, and those with nano-scale pores, the nano-porous one has the highest static and dynamic sensitivities, whereas the solid one has the lowest.
基金
supported by the National Natural Science Foundation of China (Grant Nos.10872003,10932001 and 10525209)
the Foundation for the Author of National Excellent Doctoral Dissertation of PR China (FANEDD,GrantNo.2007B2)
