摘要
以掺溴聚苯乙烯平面调制箔靶的制备为主，介绍通过激光干涉法结合图形转移工艺获得具有正弦起伏图形的掺溴聚苯乙烯平面调制箔靶的工艺．对表面调制起伏图形的精确转移进行研究，以ＳＥＭ和台阶仪监控图形转移过程，控制耦合在调制图形上的表面粗糙度．
The preparation of surface perturbation targets on brominated polystyrene foil is discribed. Through laser interference and figure-transfer processes, sine modulated configurations on brominated polystyrene foils were obtained. The transfer-precision of the configurations was controled by SEM and an α-step apparatus. The surface roughness was analysed.
出处
《物理》
CAS
1998年第11期687-690,共4页
Physics
基金
国家863高技术基金
关键词
平面调制靶
掺溴聚苯乙烯
制靶技术
ICF
surface perturbation target, brominated polystyrene, target fabrication technology, figure-transfer process
