钢注入Ti^+离子束的真空碳化和微观结构的变化

Vacuum Carburization of H13 Steel by Titanium Ion Implantation and the Microstruture of the Carburized Surface Layer

Ｔｉ＋（１００ｋｅＶ，３×１０１７ｃｍ－２）注入Ｈ１３钢，表面注入层的化学组成和微观结构发生了很大的变化，俄歇分析表明，注入元素Ｔｉ在钢表面层的剖面含量分布呈近似高斯分布，在４０ｎｍ处原子数分数达到其峰值（２５％），离子束真空碳化导致在钢的表面形成一层约２０ｎｍ的“渗碳层”。透射电镜分析表明，表面层的微观形貌由注入前的板条状马氏体结构转变成注入后的微胞状结构，电子衍射则进一步证实，表面层已出现非晶化。

The chemical composition and microstructure of the Ti +_implanted surface layer of H13 steel has been studied. The titanium ion intensity generated under a voltage of 100 kV was 3×10 17 cm -2 . Jud_ging from Auger spectra, the vertical profile of Ti in the surface layer obeys a Guassian distribution with a peak value (25%) at 40 nm. Vacuum carburization led to the formation of a 20 nm thick carburized layer. TEM analysis showed that the microstructure of the implanted surface layer had changed from acicular martensite to a micro_cellular structure. Electron diffraction analysis verified that the surface layer became amorphous, and TiC was precipitated.