纳秒激光在硅表面微结构加工及其荧光效应

Microstructure and luminescence property of silicon induced by nanosecond pulse laser

本文自主研发设计了一套基于纳秒脉冲激光的加工系统,包括了控制单元、上位机图形软件、机械结构和光路系统。利用此系统,在单晶硅表面进行了微结构图形的加工实验,得到了较好的加工效果。借助卤素灯照明的显微镜和荧光显微镜对结果进行了进一步的观察分析,发现利用荧光显微镜进行观察,加工后的区域在特定波长照明光的照射下激发出荧光,可以清楚的看到加工结构的内部信息,边缘特征。说明纳秒脉冲激光可以改变硅材料表面的光学属性,这对进一步研究激光和硅材料的相互作用打下了一定的基础。

A digital multifunctional laser machining system,including control system,software of computer,mechanical structure and optical system,is designed. With the system,some microstructures have been processed in the single crystal silicon and system realizes good result.With microscopy illuminated by Halogen Light and fluorescence microscopy,results are further observed and analyzed.The ablated region illuminated by specific wavelength light has luminescence property.It is clear to see the internal processing structure information and edge characteristics.Nanosecond pulse laser can change material property of silicon,which help us to study the process of laser silicon interaction.