单片机控制的准分子专用组合电磁阀门

Excimer gas charging system based on microprocessor

介绍了一个用于准分子激光器自动充排气的系统,它由单片机控制的组合电磁阀门构成。文章阐明了系统、机械、电气和软件的结构。在KrF准分子激光器上实现了重复精度较好的自动配气。整体结构紧凑、性能稳定,简化了充配气操作,还可以用它实现自动微调激光气体成分,达到延长工作气体寿命的目的。

A new Excimer Gas Charging System based on a new complex valve and controlled by MCU was introduced,together with the principle of the system,structure of the complex valve and the flow diagram of controlling method.Tested on the 248nm KrF excimer,the auto excimer gas charging with high precision and high repeat precision was realized.Composed of hardware and softvare,the system was designed simply and reliably and also it could be controlled conveniently.It is the base of the Excimer Controlling System.