摘要
本文介绍了高帧速摄像器的设计、制造、工作和性能。该高帧速有360×360像素、摄像速度高达5×105帧/秒,该摄像器读出电路类似于帧转移CCD。
Design,fabrication,operation and per for mance are described for a 360×360 element very high frame rate (VHFR) image sensor which can capture images at a frame rate of up to 5×10 5 frames/s. Readout of this imager is similar to a frame trans fer CCD consisting of four parts.
出处
《电子器件》
CAS
1998年第4期240-250,共11页
Chinese Journal of Electron Devices
关键词
高帧速
埋入沟道
高速光检测器
开口率
high frame kate\ \ buried channel\ \ high speed photodetector\ \ Fill factor\ \ readout noise\ \ dynamic range.