摘要
分析了YAG调Q激光陶瓷基板划片的机理.提出了较完善的整机总体设计方案，解决了百瓦级YAG激光的声光调Q、工件走位高定位精度高重复精度与高速进给等关键技术，整机达到了预定指标和实用效果。
The mechanism of cutting ceramic substrate by using Nd: YAG Q-switching laser was analyzed. It is presented a better design of the cutting system, developed the key technique for acousto-optic Q-switching high power laser of 100 watts, applied double axis linear motor positioning system with high precision positioning capability and high speed. The laser cutter had been reached predicted specification and had practical result.
出处
《应用激光》
CSCD
北大核心
1998年第6期249-250,248,共3页
Applied Laser
