纳米晶体Ti表面磁控溅射CN_x/SiC双层薄膜的干摩擦磨损性能

Dry Friction/Wear Behavior of Magnetron Sputtered CN_x/SiC Bilayered Films on Nanocrystal Ti Substrates

采用室温磁控溅射技术在纳米晶体钛表面制备出CNx/SiC双层薄膜,SiC为中间层。研究了CNx薄膜的纳米压痕行为和摩擦磨损性能。试验结果表明:CNx薄膜的纳米硬度、杨氏弹性模量、硬度与弹性模量比值分别为8.03GPa,55.0GPa和0.146;在200g载荷、氮化硅球(半径为2mm)为对摩件、大气干摩擦条件下,CNx薄膜的磨损速率为10-6mm3m-1N-1级,摩擦系数约为0.159,磨损后薄膜未出现裂纹和剥落。分析表明,摩擦系数和摩擦化学有关,良好的抗磨性能和硬度与弹性模量比值较之是相一致的。

The mechanical properties of the CNx/SiC bilayered coatings, deposited by magnetron sputtering at room temperature on nanocrystal Ti substrates, were studied. The results show that the CNx film has a nano-hardness of 8.03GPa,a Young modulus of 55.0GPa, and a hardness-to-modulus ratio of 0.146. When sliding against silicon nitride ball, 2mm in diameter, under ambient environment at a load of 200g, the friction coefficient of the CNx film was found to be 0.159, with a specific wear rate up to the magnitude of 10^-6 mm3m^- 1N^- 1, while without observable cracking or peeling off. Possible mechanism was tentatively discussed.