能量法表征硅基底上韧性薄膜的塑性性能

An energy method to extract the plastic properties of thin films on Si substrate

用三维弹塑性大应变有限元方法分析了沉积在硅基底上各种不同金属薄膜材料的Berkovich压入响应.通过能量量纲化结合有限元方法建立了一种表征金属薄膜塑性性能的方法.基于本文建立的能量法推导出了硅基底上铝薄膜的塑性性能,并与单轴拉伸实验结果及文献中方法得出的结果进行了比较,发现由本文中模型得出的结果与单轴拉伸的结果更为吻合.用本文提出的能量法来表征金属薄膜的塑形性能是完全可行的.

The finite element method （FEM） for elastic-plastic large strain was employed to study the indentation of the different kinds of metal films deposited on Si substrate using a rigid Berkovich indenter. In this paper, a new methodology to extract the plastic properties of metal films was proposed using energy dimensional analysis and finite element computation. The calculated plastic properties are consistent with the results measured by a uniaxial tensile test on an Al film deposited on Si substrate, confirming that the energy method to extract the plastic properties of thin films is feasible.