络合剂对ZnO薄膜的结构及其光电性能的影响

Effect of Complexants on the Microstructure and Electrical and Optical Properties of ZnO Thin Films

在400℃预处理温度下,以醋酸锌为前驱体,分别以乙醇胺、二乙醇胺和三乙醇胺为络合剂,在普通玻璃载玻片上采用溶胶-凝胶技术成功地制备了C轴择优取向的ZnO薄膜.用X射线衍射、紫外-可见吸收光谱、光致发光光谱和平行电极法等技术研究了以不同络合剂制备的ZnO薄膜的结构、缺陷组成及其光电性能.结果表明:络合剂对ZnO薄膜结构的影响很大,不同结构的薄膜,其性能也有很大的差异.其中,以乙醇胺为络合剂制备的ZnO薄膜具有最佳的(002)晶面择优取向,并能减少晶界处载流子的散射,使薄膜具有较高的光电流.

A series of ZnO films have been deposited on glass substrates using sol-gel technique by varying the complexants. X-ray diffraction, UV-Vis absorption spectropscopy and Photoluminescence were employed to characterize the phase composition, optical absorption, defects, et al. The photocurrent of ZnO films was identified by parallel electrode method. The results showed that complexant has much effect on the microstructure and the properties of the ZnO films. The ZnO films derived from ethanolamine complexant show a preferred orien- tation along the （002） plane. The higher the c-axis preferred orientation the higher photocurrent due to the reduction in the scattering of carriers at the grain boundaries.