摘要
介绍了一种与传统MTF法完全不同的测量电流密度因子n的新型动态电流斜坡测试法。测试了4种不同样品。结果表明,n值与材料有关,并符合BLACK方程。
In this paper,a new dynamic current ramp method is different from the conventional MTF developed for testing the exponent n.The n of four samples have been measured,the results proved the values of n are dependent on materials and agree well with the BLACK equation.
出处
《半导体技术》
CAS
CSCD
北大核心
1998年第6期19-22,49,共5页
Semiconductor Technology