激光辅助化学气相沉积金刚石薄膜实验研究

Synthesis of Diamond Films by Laser assisted Chemical Vapour Deposition

本文采用激光辅助化学气相沉积法合成了厚度为１５μｍ的金刚石薄膜。实验结果表明：以丙酮为碳源气体，并用ＸｅＣｌ（３０８ｎｍ）准分子激光解离，Ｈ２用灯丝进行予先解离，适当选择和控制各种实验参数，可获得高质量的金刚石薄膜。

The diamond films with thickness of 15μm have been synthesized by the Laser Assisted Chemical Vapour Deposition(LACVD) methods using mixtures of actone and hydrogen.The XeCl excimer laser with a wavelength of 308nm has been utilized as photo disociation energy source for carbohydrate,and H 2 has been predisociated by not filament.The experimental result have shown that a high qualitied diamond film can be produced through suitable selection of deposition conditions.Effects of substrate temperature、laser energy、filament temperature and concentration of actone on the quality and deposition rate of diamond films have also been discussed in this paper.