一个改进型的双框架硅微机械陀螺仪

An Improved Double Gimbal Silicon Micromechanical Gyroscope

本文分析了双框架式硅微机械陀螺仪的作用机理,提出了改进双框架式硅微机械陀螺仪性能的措施.仿真结果表明,通过改进,陀螺仪的灵敏度和信噪比都可以大大提高.

Abstract The principle and performance of double gimbal silicon micromechanical gyro-scope have been analysed, and the proposals for improving the structure and performanceof the gyroscope have been put forward in this paper. The simulating results show that thesensitivity and the signal to noise ratio of the improved structure have been raised.