可对多目标测量的硅传感器系统

The Silicon Pressure Sensor System Measured Multi-Object

本文介绍了一种新型的可对多个目标进行测量的硅压力传感器系统的研制.它是把多个硅压力传感器组合成一个完整的传感器系统,用于对多个不同的对象同时完成独立测量.文章具体描述了对压力、流量、干度实测测量的原理、过程以及传感器系统的结构制作.

Abstract The paper full describes a new-type multi-object system of silicon pressure sen-sors that consists of some pressure sensors. The system of sensors can measure many ob-jects, for example, pressure, flow and vapor quality in two-phase flow of gas and liquid,at the same time. The principle of test and the structure of sensor system are analyzed inthis paper.