摘要
简要介绍了等离子体技术和微细加工技术。叙述了等离子体技术在微细加工技术的三个主要方面———微细图形加工、离子注入、薄膜沉积———中的应用。
Plasma technology and micro process technology are presented simply. The application of plasma technology to three main aspects of micro process technology-micro graph process ion implanation films deposition-were gaven.
