直径 2mm 电磁型微马达的研制及其气隙磁场的分析

Study on φ2mm Micro Electromagnetic Motor and Analysis of Magnetic Field

微机电系统（ＭＥＭＳ）是正在国际上发展的新兴学科，微马达是微机电系统中的关键器件。本文介绍了研制成的直径为２ｍｍ、高０．７ｍｍ的电磁型微马达的结构特点，并对气隙磁场分布作了分析讨论。

Micro electronic mechanical system (MEMS) is a new developed research field in the world, micromotor is a crux device in MEMS. In this paper, a novel structure of micro eletromagnetic motor with 2mm in diameter and 0.7 mm in height developed in Shanghai Jiaotong University was introduced, and distribution of magnetic field in air gap was analyzed and discussed.