微探针纳米尺度振动测试的实验研究

Experimental measurement of the nanoscale vibration of microprobe

微探针是扫描探针显微镜(SPM)的重要组成部件,其共振频率等振动特性直接影响系统的性能。给出了系统微探针共振频率的测试方法,对微探针在压电陶瓷驱动力作用下的受迫振动进行了有限元分析。提出了相位变化0.1°所对应的0.1nm位移分辨率的双频激光外差干涉光学测量系统,对微探针纳米尺度振动特性进行了测试对比实验,并对SPM标定样块进行了比对分析。实验结果验证了双频激光外差干涉测量方法的可行性和其应用价值。

Microprobe is an important component of the Scanning Probe Microscopy （SPM）,and its vibration characteristics such as resonant frequency,directly influence the performance of SPM.The testing methods of microprobe＇s resonant frequency are analyzed first,and the harmonic vibration of microprobe with damping is simulated by the finite element analysis.The heterodyne interferometry that utilizes a transverse Zeeman laser is proposed for measuring the high speed nanoscale vibrations of microprobe.The phase measurement technology is adopted,and a resolution of 0.1nm can be attained.Experiments are set up to testify and analyze the resonant frequency and displacement spectra of microprobe＇s nanoscale vibrations and the measuring pitch matches the nominal pitch of the SPM sample,which not only prove the measurement method is feasible but also prove the value of practical application.