摘要
波长移相干涉仪可应用于大口径光学元件的检测。研究了基于Lissajous图技术的波长移相标定方法,实现了干涉图间移相量的计算,解决了在不同干涉腔长下进行测试时移相量需控制成为一个特定值的问题。首先通过模拟仿真,验证了方法的正确性;然后编写程序对已知移相量的实际干涉图进行计算。结果表明,在干涉图对比度较好以及对计算的两点选择恰当的情况下,计算出的相对误差在4%范围内。
Wavelength-tuned interferometers are applied to test the large optical components.The phase-shifting calibration method based on the Lissajous figures technique is studied.Through the method,the phase-shifting steps between the interferograms are obtained.How to control the phase-shifting step to a certain value at different interferometric cavity lengths when testing is solved.The simulation program is written and it shows the method correct.The program is written to calculate the interferograms which the phase-shifting step is known.The result shows that the relative error is in the range of 4% when the contrast of the interferograms is good and the calculated points are selected correctly.
出处
《光学技术》
CAS
CSCD
北大核心
2010年第2期200-204,共5页
Optical Technique
关键词
光学测量
波长移相
Lissajous图
移相量计算
optical testing
wavelength phase-shifting
Lissajous figure
phase-shifting value calculation
