摘要
应用光学理论研究了一种μm级位移分辨率的反射型双级光栅测量系统,建立了反射莫尔信号与对应位移的数学模型,通过计算机仿真分析了反射莫尔信号的位移特性,进而设计了一套基于反射光栅的精密定位系统。系统取反射的0次激光莫尔信号为控制信号,由微机控制实现高精度位置检测及超精密自动定位;采用的修正莫尔技术,极大地提高了位置检测信号的灵敏度及定位精度;通过粗定位和精定位相结合的两段式复合定位,实现高速高精度定位。实验结果表明,基于反射光栅的精密定位系统可获得±10nm的定位精度。
A nano-displacement measurement system with reflection duo-gratings is analyzed by using optics theory,a mathematic model for the system is established,and the characteristic of laser Moiré signals is studied through CAD simulation.A precise position device using double reflecting gratings is designed,which can achieve precise position measurement and automatic precision alignment by the Moiré signal.The modified Moiré positioning technique is used,which greatly improves the sensitivity of position signals and positioning precision.The compound control system for precision positioning is set up using the coarse alignment and the fine alignment.The experimental result shows that the alignment device using reflecting gratings can perform positioning accuracy of ±10 nm.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2010年第1期70-73,共4页
Journal of Optoelectronics·Laser
基金
国家高技术研究发展计划"863"资助项目(2005AA303610)
江苏省自然科学基金资助项目(BK2009406)
关键词
反射光栅
莫尔信号
修正莫尔技术
精密定位
复合控制
reflective gratings
Moiré signals
modified Moiré technique
precision alignment
compound control
