人造含硼金刚石单晶表面形貌与生长机制研究

Surface Morphology and Growth Mechanism of the Synthetic Boron-doped Diamond Single Crystals

本文借助Olympus光学显微镜、扫描电子显微镜(SEM)和原子力显微镜(AFM)对高温高压合成的含硼金刚石单晶表面形貌进行了分析。研究发现,含硼金刚石表面存在蚀坑、球形颗粒集团、平行台阶、花瓣状生长丘和三角形螺旋台阶等多种表面形貌。这些形貌与晶体内部的缺陷有关,硼原子的进入使金刚石晶体生长速度增加,位错增多,进而导致不同表面形貌的形成,螺旋位错生长是含硼金刚石的主要生长方式。

The surface morphology of the boron-doped diamond single crystals was analyzed by means of Olympus optical microscope,scanning electronic microscope（SEM） and atom force microscopy（AFM）.Various features are found on the crystal surfaces of the boron-doped diamond such as pits,spherical clusters,parallel steps,petal-like knobs and triangle spiral steps,which distinguish to those on the surface of plain diamonds.These features are concerning to the dislocations of the crystal lattices.The boron atoms accelerate the diamond growth and increase the dislocation.It is demonstrated that the screw dislocation growth pattern should be the main growth mechanism of the boron-doped diamond.