La_(1-x)Sr_xMnO_3电极的制备及其对Ba_(1-x)Sr_xTiO_3薄膜介电性能的影响

Preparation of La_(1-x)Sr_xMnO_3 Electrode Material and Influence on Dielectric Performance of Ba_(1-x)Sr_xTiO_3 Thin Film

采用溶胶-凝胶法在Si(100)基底上制备了La1-xSrxMnO3电极材料。采用XRD、SEM对材料的晶体结构、表面形貌、薄膜厚度进行了表征,研究了退火温度对薄膜结构及电阻率的影响,以及介电常数与介电损耗随频率变化的关系。结果表明:在x=0.5,退火温度为800℃时,La0.5Sr0.5MnO3薄膜的电阻率为1.2×10-2Ω.cm。La0.5Sr0.5MnO3薄膜与Ba1-xSrxTiO3匹配性较好,实现了BST薄膜的外延生长,其介电性能比在Pt上制备的Ba1-xSrxTiO3得到了明显的改善。

La1-xSrxMnO3 electrode material was fabricated on Si（100） substrate by Sol-gel process.The crystal structure,surface appearance and thickness of thin films were characterized by XRD and SEM.The effect of annealing temperature on structure,electric resistivity,the dielectric constant and loss dependence of frequency were studied.The results show that the lowest electric resistivity of La1-xSrxMnO3 is 1.2×10-2Ω·cm in the condition of x=0.5,annealing temperature at 800 ℃.Epitaxial Ba1-xSrxTiO3 thin film on La0.5Sr0.5MnO3 electrode was obtained,which has better dielectric property compared with Pt/Ba1-xSrxTiO3 due to the good structure match between Ba1-xSrxTiO3 and La1-xSrxMnO3.