活性屏离子氮化过程中氮的输运机理分析

Analysis of Mass Transferring in Active Screen Plasma Nitriding

将活性屏离子氮化过程中活性氮原子的输运方式分为无输运介质的扩散输运与有输运介质的吸附输运两种,指出扩散输运是活性氮原子的重要输运方式之一。此外,还重新分析了文献报道的活性屏离子氮化实验结果,阐述了活性屏材质等因素对氮化效果的影响。

There are two kinds of mass transferring methods in active screen plasma nitriding, one is the diffusion of active particles containing nitrogen atoms, and the other is the adsorption nitrogen in sputtering particles. The first one is the most important manner of nitrogen transferring. In addition, experimental results reported in literatures are investigated again, and effects on the nitriding of materials of active screen and other factors are discussed as well.