用于挥发性有机化合物探测的微悬臂梁传感器(英文)

Microcantilever Sensor for the Detection of Volatile Organic Compounds

在研制成功的用于化学气体探测的热驱动微悬臂梁谐振器的基础上,提出了基于这种微悬臂梁谐振器,并以聚合物涂层作为挥发性有机化合物吸附敏感层的谐振式气体传感器.利用3种聚合物材料:聚氧化乙烯(PEO)、聚乙烯醇(PVA)和聚乙二醇乙醚醋酸酯(PEVA),在微悬臂梁谐振器上制备气体敏感层,探测6种挥发性有机化合物:甲苯、苯、乙醇、丙酮、己烷和辛烷.通过有限元分析估计了聚合物涂层的工作温度.用喷射法制备了PVA和PE-VA涂层,用点滴法制备了PEO涂层.测试了传感器的开环幅频特性,实验检测了气体传感器的谐振频率变化与分析物蒸气浓度的关系以及传感器对相对湿度的响应,分析了传感器的灵敏度和线性度.实验结果表明,这种涂覆聚合物敏感层的热驱动微悬臂梁谐振器为探测挥发性有机化合物提供了良好的平台.根据实验结果,可开发几种基于不同聚合物敏感层的高灵敏度微型气体传感器.

Based on a thermal driving microcantilever resonator that has been developed for gas sensing application,a resonant gas sensor consisting of the microcantilever resonator coated with polymer as the sorbent layer for the detection of volatile organic compounds（VOCs）was presented.Three types of polymers,polyethyleneoxide（PEO）,polyvinylalcohol（PVA）and polyethylenevinylacetate（PEVA）were used to detect six types of VOCs,toluene,benzene,ethanol,acetone,hexane and octane.The operation temperature of the polymer layer was estimated through finite element analysis.PVA and PEVA coatings were prepared through a spray method and PEO coating was prepared through a dropping method.The open-loop amplitude-frequency characteristic of the sensor was measured.Moreover,the dependence of the frequency shift of the sensors on the vapor concentration of the analytes,and the response of the sensors to relative humidity were tested;meanwhile,the sensitivity and linearity of the sensors were analyzed.The experimental results provide confirmation that the polymer-coated thermal driving microcantilever resonator is an excellent platform for VOCs detection.According to the experimental results,sensitive and miniature gas sensors based on the microcantilever resonator with different polymers can be proposed.