摘要
本文对声表面波(SAW)力传感器的基本工作原理进行了理论分析,同时对该传感器进行了实验研究。实验获得了约2.3kHz/9.8×10^(-3)N 的力灵敏度。实验表明该传感器是一个线性传感器,对于微力测量十分敏感。
In this paper,the author analyzes the basic principle ofsurface acoustic wave(SAW)force sensor.At the same time,the exper-imental studies of SAW force sensor are also discussed.The force sen-sitivity obtained in the experiments is about 2.3kH_z/9.8×10^(-3)N.In addi-tion,the experiments also show the sensor is a linear sensor andextremely sensitive to micro-force measurement.
关键词
声表面波
力传感器
传感器
SAW resonator(SAWR)
SAW force sensor
micro-force measurement
