摘要
介绍了一种以光纤布拉格光栅为传感元件的三维测头。测头结构核心为3根悬丝和支架组成的柔性支撑系统，传感系统由3根传感FBG和一根匹配FBG光栅组成。测头的关键参数测定结果为结构复位性精度小于20nm，传感系统重复性小于0．2mV，分辨力小于0．1μm，测力小于5mN。
A 3-D probe based on Fiber Bragg Grating（FBG） is introduced. The flexible suspension which composed of three molybdenum threads and a plank is the key part of the structure. The sensor system is composed of three sensor FBG and a match FBG. The structure repeatability is less than 20 nm, the sensor system repeatability is 0. 2 mV, the highest resolving power is 50 nm,and the probing force is less than 5 mN.
出处
《计量学报》
CSCD
北大核心
2010年第2期115-118,共4页
Acta Metrologica Sinica
基金
国家自然科学基金（50627501）
