垂直扫描白光干涉测量数据处理算法分析

Research on Vertical Scanning White-light Interferometric and Interferogram Processing Algorithms

研究了垂直扫描白光干涉测量数据的改进质心处理算法以准确得到被测表面的微观形貌信息。根据垂直扫描白光干涉测量原理分析了质心算法改进前后的对干涉谱的处理能力。实验测量对象是Ra为0.074μm的多刻线标准样板,采用高斯滤波算法分离粗糙度信号,对其二、三维参数进行了评定和分析,得Ra为0.0748μm。结果证明,改进质心算法原理正确,计算精度满足测量要求,可有效排除直流信号等因素对质心算法的影响。

To precisely obtain the topography of a measured surface,the sampled data processing algorithms of vertical scanning white-light interferogram were studied.According to vertical scanning white-light interferometric characteristics,the processing abilities of centroid algorithms improved before and after were analyzed.In the experiment a gauged sample with Ra 0.074 μm was measured and some parameters of its roughness profile given by Gausian filter were evaluated,Ra of which was 0.0748 μm.The results show that the improved centroid algorithm is correct,accurate and able to eliminate the DC signal.