STM和AFM的研制

Developing Work of STM and AFM

叙述ＳＴＭ（扫描隧道显微镜）和ＡＦＭ（原子力显微镜）的主要关键技术和研制情况。在研制的ＳＴＭ和ＡＦＭ样机上，对１２００１／ｍｍ光栅进行测量，得出本样机的测量重复性可达１０％以内。对研制的样机进行分析和对比后提出：ＳＴＭ和ＡＦＭ，尤其是ＡＦＭ，技术上已趋于成熟；使用上简单、方便，已达到实用化程度，可以作为高级表面粗糙度测量的常用计量仪器。

This paper introduces some critical technology of the development of STM(Scanning Tunneling Microscope) and AFM (Atomic Force Microscope). On the instrumentof the developing STM and AFM,the 1200 1/mm grating is measured,and we get the reproducibility of these instruments reaching 10%. After comparing and analyzing,we believe thatthey are approximating to maturity in technology on the developments of STM and AFM,especially AFM. Because they are easy to operate,this instrument can be put into practical useas an advanced measurement instrument for surface roughness.