SrF2-CaF2混合物薄膜的物理及红外光学特性研究

Physical and infrared optical properties of mixed SrF_2-CaF_2 thin films

采用热蒸发和电子束蒸发两种沉积方式分别沉积了相同厚度的SrF2-CaF2(比例为1∶1)的混合物薄膜,对其物理和光学特性进行了研究,并定量地给出了其在红外波段的光学常数,填补了这一数据的空白.同时提供了一种获得不同低折射率薄膜的方法.文中还以该比例的混合物作为低折射率材料,研制出具有很好的光学性能的长波红外宽光谱增透膜.

The mixed SrF2-CaF2thin films with the same thickness were deposited by the techniques of resistant evaporation and electron beam evaporation respectively.The physical and infrared optical properties of the thin films were investigated.The optical constants in the infrared region were determined quantitatively which fills the gap of these data.At the same time,we provided a method to obtain gradient index films.We also used the mixed SrF2-CaF2 with a proportion of 1：1 as the lower index material to deposit multilayer coatings.A broadband antireflection coatings with high optical performance was developed.