微细电解加工的过程检测及精度控制

Investigation on Monitoring and Control of Electrochemical Micro-machining Process

超短脉冲微细电解加工时,极间加工间隙很小,加工过程的稳定性是影响加工精度的重要因素。在所建立的加工控制系统中,采用两步短路对刀法精确定位电极初始间隙,利用霍尔电流传感器实时检测平均加工电流,动态控制电极的进给运动速度,从而保持不同加工条件下稳定加工的最小加工间隙。进行了微细结构的电解加工试验,通过检测加工过程的状态,保证了加工的稳定性,实现了线宽只有25μm的微细结构加工。

While an ultra--short pulse power supply was applied into the electrochemical micro-- machining, the stabilization of machining process is an important factor affecting the machining precision due to the very small inter--electrode gap. In the machining control system, a two--step location method was proposed to exectly define the beginning iner--electrode gap. A Hall current sensor was used to detect the average current signal in real--time, and the feed speed was controlled dynamically. Therefor the smallest machining gaps of the stable machining process were maintained on different conditions. According to the detection and analysis of machining states, a micro- structure with 25μm width is carried out by utilizing the stable micro--ECM process.