摘要
介绍了一种新型MOCVD反应腔压力控制系统,采用MKS最新蝶阀T3BI,其内部集成了压力控制器,并且带有压力传感器接口。反应腔内目标压力由主控PC通过工业以太网ProfiNet发送到蝶阀,接下来压力控制子系统即可完成整个压力控制过程。
A new type of pressure control system for MOCVD reactor is introduced. In this system the MKS type T3BI Exhaust Throttle Valve typed T3BI is used, which is with integrated on-board controller electronics and dual channel Baratron input with range auto switching. The desired pressure of reactor is sent to the throttle valve from PC by ProfiNet. Then the pressure control system can finnish all the pressure control procedure.
出处
《电子工业专用设备》
2010年第4期36-38,共3页
Equipment for Electronic Products Manufacturing
