摘要
提出一种基于蠕动式运动原理的新型双向变步长的大位移压电作动器,建立了该作动器的动力学模型。在30Hz作动频率下,采用MATLAB-SIMULINK软件进行了仿真。设计了含有高电压驱动器的作动器实验系统,作动器样机整体机构由嵌位部分、作动部分和轨道间距微调部分组成。研究结果表明,该作动器实际可提供±8mm的双向往返运动,实际作动曲线与计算机仿真结果在0.1μm级精度条件下吻合良好。
A new inchworm-type actuator with variable step and large displacement is presented. Dynamic model for piezoelectric actuator is built up, and the dynamic performance of the actuator is simulated by the MATLAB SIMULINK while the actuator working frequency is 30Hz. Experiment system with high voltage driver is designed, this actuator is composed of three parts: the clamping structure, the pushing structure and the tuning structure. This actuator can provide ±8mm displacement, and the results of experiment are in good agreement with that of the Simulation in 0.1 μm accuracy demanded.
出处
《应用力学学报》
CAS
CSCD
北大核心
2010年第1期108-112,共5页
Chinese Journal of Applied Mechanics
基金
民用航天预研项目(C4120061309)
关键词
蠕动
变步长
大位移
压电作动器
inchworm, variable step, large displacement, piezoelectric actuator. Abstract: In order to obtain fracture criteria of interface crack with sat
