如何选择和使用涡轮分子泵

Selection and operation of turbomolecular pump

本文首先介绍了涡轮分子泵的工作原理,结构型式及其优缺点。为了利用涡轮分子泵,获得清洁真空,国外多利用干式机械泵作其前级泵,构成无油的真空系统。然而,目前国内涡轮分子泵多以油封机械泵为其前级泵,构成了有油真空系统,如果操作不当,很难避免油蒸汽返流,对真空系统的污染。利用有油系统获得清洁真空,国内外都有一些有效防止返流的措施和成功的操作经验。这些对用户正确选择和使用涡轮分子泵有油系统获得清洁真空,有一定的参考价值。

Describes the operating principle, construction and advantages/disvantages of turbomolecular pumps. To acquire clean vacuum by use of such pumps, most of their backing pumps are of dry type at present in foreign countries, and the oilfree vacuum systems are thus provided. In China, however, most of the backing pumps for turbomolecular pumps are still the oil sealed mechanical pumps which form the oily vacuum system unavoidably and, what＇s more, it is so hard to prevent the oily vapor from back flow and, as a result, the vacuum system will therefore be contaminated in case of improper operation. Fortunately, there are several efficient measures to take for preventing the back flow and successful experience in operation at home and abroad to acquire clean vacuum from the oil-contaminated vacuum system mentioned above. They will benifit users to select and operate the turbomolecular pumps properly as references.