基于PLC的直流电弧等离子喷射化学气相沉积金刚石设备自动控制系统

PLC-based autocontrol system for DC-arc plasma jet system to deposit diamond by CVD

针对直流电弧等离子喷射化学气相沉积金刚石设备,以PLC作为系统的控制核心,触摸屏作为人机界面,梯形图为编程语言,不仅实现了设备的自动运行,而且还由上位机的组态软件通过485总线实现了多台设备的远程监视和生产数据的长期记录。实际运行结果表明,整个系统硬件可靠,软件运行稳定,达到了设计要求。

For the DC-arc plasma jet system to deposit diamond by CVD （chemical vapor deposition）, a PLC was taken as the core of its autocontrol system with touch screen as man-machine interface and lad dleder as programming language. In such a way not only the automatic operation can be implemented, but also the remote monitoring for multiple devices and long-term recording of operational data are both available via the 485 bus for the confiquration softwares of upper computer. The actual running result showed that the autocontrol system thus designed is composed of reliable hardwares and stably running softwares and meets the design requirements.