太阳能多晶硅铸锭用熔融石英坩埚氮化硅涂层的制备

Preparation for Silicon Nitride Coating of Fused Quartz Crucible for Solar Polysilicon Ingots

熔融石英坩埚是生产太阳能多晶硅铸锭的必要容器,为脱模方便,需在其内表面喷涂一层氮化硅.采用高纯氮化硅粉在国产石英坩埚上喷涂,研究喷涂氮化硅浆液时石英基底温度和涂膜厚度对石英坩埚氮化硅涂层结合强度的影响.结果表明:采用高纯氮化硅粉喷涂石英坩埚基底,温度应在40℃以下且喷涂涂层厚度不宜超过80μm.

Fused quartz crucible is the indispensible container for solar polysilicon ingots, in order to demould easily, it is necessary to spray a film of silicon nitride on the inner surface. It utilizes high-purity silicon nitride powder to spray on domestic quartz crucible and focuses on effects from different temperatures of quartz base and coating thickness on bonding intensity. The findings show that the suitable temperature should be controlled under 40℃ and the coating thickness shouldn＇t go beyond 80μm.