结构陶瓷在压力传感器中的应用

Structure Ceramics Applied In The Pressure Transducer

结构陶瓷作为零力学滞后、低介电绝缘材料，在压力传感器中应用可以降低压力传感器的蠕变现象．提高其反应速度。由于陶瓷烧结体耐高温、耐腐蚀，可以在其上制备微米级导电和绝缘薄膜，使压力传感器的精度和抗冲击、抗过压能力大大提高。其相关技术为其它传感器的小型化、集成化、多功能化奠定了基础。

Structure ceramics being a low mechanical hysteresis and dielectric insulating material, a pressure transducer cut down creep, and increased reaction speed. Ceramics sinter-ing was heat-resisting and corrosion-resistance, on which we could build a lay of insulating film (the thickness is a several micron). The precision of a pressure transducer was improved,the resistance of pounding and over pressure was increased. Transducers related to this tech-nique lying a foundation for miniature, grand compendium, multi-function.