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Atomic Emission Spectra Diagnosis and Electron Density Measurement of Semiconductor Bridge (SCB) Plasma 被引量:2

Atomic Emission Spectra Diagnosis and Electron Density Measurement of Semiconductor Bridge (SCB) Plasma
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摘要 Emission spectra of a semiconductor bridge (SCB) plasma in a visible range was studied in air. The electron density was measured in a conventional way from the broadening of the Al Ⅰ 394.4 nm Stark width. Based on the Saha equation, a system for recording the intensity of Si Ⅰ 390.5 nm and Si Ⅱ 413.1 nm was designed. With this technique, the SCB plasma electron density was measured well and accurately. Moreover, the electron density distribution Vs time was acquired from one SCB discharge. The individual result from the broadening of the Al Ⅰ 394.4 nm Stark width and Saha equation was all in the range of 1015 cm^-3 to 1016 cm^-3. Finally the presumption of the local thermodynamic equilibrium (LTE) condition was validated. Emission spectra of a semiconductor bridge (SCB) plasma in a visible range was studied in air. The electron density was measured in a conventional way from the broadening of the Al Ⅰ 394.4 nm Stark width. Based on the Saha equation, a system for recording the intensity of Si Ⅰ 390.5 nm and Si Ⅱ 413.1 nm was designed. With this technique, the SCB plasma electron density was measured well and accurately. Moreover, the electron density distribution Vs time was acquired from one SCB discharge. The individual result from the broadening of the Al Ⅰ 394.4 nm Stark width and Saha equation was all in the range of 1015 cm^-3 to 1016 cm^-3. Finally the presumption of the local thermodynamic equilibrium (LTE) condition was validated.
出处 《Plasma Science and Technology》 SCIE EI CAS CSCD 2010年第1期49-52,共4页 等离子体科学和技术(英文版)
基金 supported by National Major Base Projects of China
关键词 SCB plasma electron density Stark broadening Saha equation SCB plasma, electron density, Stark broadening, Saha equation
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