半导体制造工艺用化学药品的现状和展望

The status and forecast of chemicals for semiconductor manufacturing process

综述了半导体制造工艺用化学药品的应用、种类、作用、制法、纯度、评价技术和市场，还评论了半导体用药品现状和发展趋势。

In this paper,the application,kind,action,manufacturing method,purity,evaluation technology,and market of chemicals for semiconductor manufacturing process are summarized.The present situation and development trend of chemicals for semiconductor are also reviewed.