摘要
low-k材料的使用,使低下压力技术成为化学机械抛光(CMP)设备研发设计必须面临的关键技术之一,为适应该需求,提出了弹性组合元件加压技术,即通过改变加压元件的变形量来实现压力调整的机械调压技术。对该加压模式的设计要求及加压精度进行了理论分析,并进行了加压精度及压力-变形线性关系的实验验证。实验所得的加压精度与理论分析结果比较接近,加压装置的压力与变形之间基本呈线性关系。加压元件可以实现压力从零开始的低下压力、高精度压力调整。
With the use of low--k material, low down--force CMP has been a crucial technology for the equipment design. The technology of elastic compound elements was promoted to meet the needs of the low down--force. The assembly of the elastic element applied down--force in mechanical model. And down--force on the wafer was controlled by deformation of the pressure element. Re- quirements and the accuracy of pressure element were analyzed in theory, and the experimental results tallies basically with it. Also the down--force was in linear to the deformation of it. The pressure ele- ment can be regulated from zero in high precision under the low down force.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2010年第7期839-842,864,共5页
China Mechanical Engineering
基金
国家自然科学基金资助项目(50390061)
关键词
化学机械抛光
低下压力
弹性组合元件
加压元件
chemical mechanical polishing（CMP）
low down-force
assembly of elastic element
pressure element
