扫描探针显微镜在材料表征的应用

The Application of Scanning Probe Microscope in Material Characterization

作为一种广泛应用的表面表征工具,扫描探针显微镜(SPM)不仅可以表征三维形貌,还能定量地研究表面的粗糙度、孔径大小和分布及颗粒尺寸,在许多学科均可发挥作用.综述了国外最新的几种扫描探针显微表征技术,包括扫描隧道显微镜(STM)、原子力显微镜(AFM)和近场扫描光学显微镜(SNOM)等方法,以纳米材料为主要研究对象,展示了这几种技术在表征纳米材料的结构和性能方面的应用.

As one of the most powerful characterization tools, SPM could be used not only in three dimensional morphology, but also in surface roughness, aperture size and distribution, and it can be applied to many scientific fields. In this paper, we summarized several recent scanning probe spectroscope characterization techniques, including Scanning Tunneling Microscope （ STM）, atomic force spectroscope （AFM） and scanning near-field optical Microscopy （SNOM）, which could provide useful information to characterize the nanomaterials.