采用有机改性硅醇盐甲基三乙氧基硅烷制备无支撑孤立膜

PREPARATION OF SELF-SUSTAINED FILM FROM CH 3Si(OEt) 3

采用溶胶－凝胶法，以一种有机改性硅醇盐甲基三乙氧基硅烷（ＭＴＥＳ）为先驱体，制备了大尺寸的、厚度可达５０—１０００μｍ的无支撑孤立膜．并研究了成膜参数及该溶胶的配制过程对膜的质量的影响．采用ＩＲ分析了孤立膜的膜层结构，采用ＡＦＭ对膜层表面形貌及粗糙度进行了分析．

The sol-gel derived self-sustained film with large size and considerable thickness ranging from 50 to 1 000 μm was prepared by adopting CH 3Si(OEt) 3 as precursor. The influence of film forming parameters and sol-gel processes on the quality of the film were discussed in detail. IR technique was adopted to analyze the film structure and the surface morphology.The roughness of the film was investigated by atomic force microscope (AFM).