摘要
本文通过采用丝网印刷法制备了以)α－Al2O3基片为衬底的纳米和微米级TiO2厚膜，气敏性测试表明，纳米TiO2膜的电阻略高于微米TiO2膜，在实验温度范围内，电阻随氧分压的变化率明显高于微米膜，同时还以XRD，SEM对膜材料的结构和形貌进行了表征．
Nano-TiO2 and micro-TiO2 thick films were prepared on a-Al2O3 substrates by silk netlithograph method, the measured film resistance of nano-TiO2 was higher than that of micro-TiO2in experimental temperature range, nano-TiO2 film demonstrated more change as the O2 partialpressure changed. XRD and SEM were also used to characterize the stucture of the prepared films.
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
1998年第6期866-870,共5页
Journal of Inorganic Materials
关键词
二氧化钛
薄膜
电学性能
丝网印刷
nano-TiO2, resistance, gas sensitivity, sensor, thick film
