基于激光三角法的零件表面粗糙度在线测量

Surface Roughness Real Time Measurement Method of Parts Based on Laser Trigonometry

介绍一种零件表面粗糙度的激光在线测量系统,该系统基于激光三角测量系统,用无衍射激光光束作光源,用高精度的CCD摄像机作位移传感器,通过计算机进行数据处理得到表面粗糙度值。以车削表面为例,用触针法测得的表面粗糙度值和用该系统测得的表面粗糙度值相近,说明实现表面粗糙度在线检测是可能的,该测量方法具有测量速度快和能够显示被测表面的具体形貌等优点。

A kind of surface roughness real time measurement method of parts was introduced based on laser technique. This system was based on triangulation measurement system, using non-diffraction laser beam as light source and high accuracy CCD vidicon as displacement sensor. The surface roughness value was obtained by computer data processing. Experimental results show that surface roughness data measured by stylus method are similar to that of triangulation system. It indicates the real time measurement is possible and this method has the advantages of rapid measurement velocity and the surface characteristic of the parts can be obtained.