利用高分辨辉光放电质谱技术对难熔金属材料进行痕量元素定量和深度剖面分析

Quantitative trace element and depth profile analyses of refractory metals based materials using high resolution glow-discharge mass spectrometry

直接采样的高分辨辉光放电质谱(GDMS)是当今高纯固体常规分析中可用的高灵敏度分析方法之一。这种多元素分析技术通常用于主量化学成分的定量分析、监测元素质量分数随微米级深度(深度分布)的变化,或用于对多种固体和镀层上肉眼可见体积的高灵敏度的分布研究,包括纯金属、高温合金、陶瓷或其中陶瓷金属。由于GDMS的检测几乎涵盖了所有方法,因此在监测痕量级的多元素含量方面是最具成本优势的。另外,它使对在包含绝缘层和(或)镀层及两者化合物的平面上的高灵敏度的含量深度分布分析成为可能。本文着重介绍直流辉光质谱技术用于监测痕量至超含量元素分析技术目前的进展以及直接采样分析实践中应当采用的策略。

Direct sampling high resolution glow-discharge mass spectrometry（GDMS） is among the most sensitive analytical method available today for routine analyses of high purity solids.This multielement analytical technique is generally used for quantitative bulk chemical composition survey analyses,for monitoring element mass fraction variation as the function of micron scale depths（depth profiling）or for sensitive distribution studies in micro-scopic volumes in a wide variety of solids and coatings.These include pure metals,high temperature alloys,ceramics or ceramets among others.Since GDMS measurements are ＂nearly＂ inclusive survey methods,they are the most cost effective in screening multielement concentration with trace level sensitivity.In addition,very sensitive concentration depth profile analyses are possible on flat surfaces including non-conductive substrates and/or coatings and their combinations.The present paper highlights current advancements in direct current glow discharge mass spectrometry techniques for monitoring trace to ultra-trace elements and strategies that should be adopted in analytical practices using direct sampling methods.