摘要
以尖晶石结构ZnFe2O4材料为研究对象,以可溶性无机盐为原料,利用溶胶-凝胶技术在Al2O3基片上制备了ZnFe2O4薄膜,研究其对低浓度丙酮气体的敏感特性.通过DTA,TG,XRD及SEM分析手段对制膜过程及薄膜形态进行了表征.研究发现,采用柠檬酸作为络合剂的无机盐原料溶液-溶胶-凝胶(ISG)工艺,在700℃烧结温度下,可以得到覆盖良好、结构均匀、晶粒尺寸约在100nm的尖晶石结构ZnFe2O4薄膜.通过该薄膜对丙酮气敏特性测试表明,ZnFe2O4材料对丙酮具有较好的敏感性,在550℃的操作温度下,材料对丙酮气体敏灵敏度为8,响应与恢复时间小于5s.
In order to investigate the characteristics of oxide semiconductor materials to low concentration acetone gas,the spinel type ZnFe2O4 thin films were successfully prepared on Al2O3 substrate by sol-gel method using soluble inorganic salts as row materials. The synthesis process and the modality of thin films were characterized by DTA,TG,XRD and SEM. Using citric acid as chelating agent,sintered at 700 ℃,a compact and well-coated ZnFe2O4 thin film with crystal size of 100 nm would be obtained by inorganic sol-gel （ISG） method. The acetone-sensitive test shows that ZnFe2O4 thin films have a good sensitive characteristic to acetone,and the sensitivity is 8 at 550 ℃. Both the response time and the recover time are less than 5 s.
出处
《材料科学与工艺》
EI
CAS
CSCD
北大核心
2010年第1期23-26,共4页
Materials Science and Technology
基金
日本Sheet Glass材料科学与工程基金资助项目(301-05340)
