现代MEMS与深海采矿系统压力检测技术

MODERN MEMS AND PRESSURE INSPECTION TECHNIQUE FOR DEEPSEA MINING SYSTEMS

建立６０００ｍ深海采矿系统压力检测仪表的选型前无借鉴。本文分析了传统和现代压力检测技术，认为建立在ＭＥＭＳ技术基础上的压力检测仪表为解决这一难题提供了良好的技术前景。综合国外同类产品的材料、性能和制作工艺等特点，为组成体积小、质量轻、集成化、智能化和远距离传输的现代化全智能测控系统创造了条件。生产厂家应结合深海采矿，进一步提高量程、防海水腐蚀和高压密水等性能，研制出适合深海采矿的新型仪表。

No previous experiences are available for reference for selection of a pressure monitoring system for deepsea mining at a depth of 6000m Based on the traditional and modern pressure inspection technologies,it is the author′s view that a MEMS—based pressure inspection meter provides a promising solution to the problem Being small,light,integrated and intelligent,the meter is capable of long distance transmission and offers favorable conditions for creation of a modernized fully intelligent testing system Based on this technology,the cooperation of manufactures and deepsea miners enhance measurement range,resistance against seawater corrosion and high pressure water tightness,and create an appropriate testing system for deepsea mining