小型化准分子激光器的实验研究

Experimental study for small excimer laser

准分子激光器由于具有工作波长短、脉宽窄及峰值功率高等特点,已经在工业、军事和科研等领域得到了广泛的应用,并成为紫外波段研究领域的主要激光光源。随着许多新型产业发展的需要,易于集成、方便维护、长寿命、高重复频率及低成本的紧凑小型化准分子激光器拥有了广阔的应用前景。本文首先简单介绍了小型准分子激光特点及应用,然后详细讨论了自行研制的小型准分子激光器的物理结构和设计参数,并在此基础上完成了相关激光性能的实验研究,并对所得到的实验结果进行了分析和讨论,为国内小型准分子激光器件的商品化提供了可靠的研究基础。

Excimer laser has been applied broadly in industry,military and scientific research field due to short wavelengh,narrow pulse width and high peak value laser power,which has become mostly laser source in ultraviolet band field.Along with many new-type industry development,the compact small excimer laser has been provided with wide applicable foreground due to its unique feature： ease to system integrate,long lifetime,high repetition rates and low cost.A brief introduction on the basic characters and application of small excimer laser are firstly given in this paper.Physical structure and design parameters of the own-developed small excimer laser are discussed in detail.The related experimental studies of the small excimer laser are investigated and the results are analyzed and discussed.